24 March 2006 Spectroscopic polarized scatterometry applied to single-line profiling
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Abstract
Scatterometry is one of the few metrology candidates that has true potential to analyse submicrometer critical dimension (CD). This physical constraint restricts initially the scalar theory of diffraction (Kirchhoff, Fraunhofer), where no computation is needed, to describe pattern with such characteristics. Now many techniques based in a rigourous analysis of diffraction (were polarisation is considered) are developped (RCWA), however these vector theory would be difficult to apply in real time due to time consuming by computation. For that reason, we push here scattering measurement of isolated lines, in the limit of the scalar theory. We use the scattering mode of SOPRA's GESP 5 instrument, which measure separately TE and TM polarisations.
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Jean-Louis Stehlé, Jean-Louis Stehlé, Jean-Philippe Piel, Jean-Philippe Piel, Jose Campillo, Jose Campillo, Dorian Zahorski, Dorian Zahorski, Hugues Giovannini, Hugues Giovannini, } "Spectroscopic polarized scatterometry applied to single-line profiling", Proc. SPIE 6152, Metrology, Inspection, and Process Control for Microlithography XX, 61522Z (24 March 2006); doi: 10.1117/12.657431; https://doi.org/10.1117/12.657431
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