An integrated approach to the determination of a manufacturable process window in advanced microlithography

Marcelo Cusacovich; John C. Robinson; Shaunee Cheng; Greet Storms; Philippe Leray; Gian F. Lorusso

doi:10.1117/12.656503

24 March 2006 An integrated approach to the determination of a manufacturable process window in advanced microlithography

Marcelo Cusacovich, John C. Robinson, Shaunee Cheng, Greet Storms, Philippe Leray, Gian F. Lorusso

Author Affiliations +

Proceedings Volume 6152, Metrology, Inspection, and Process Control for Microlithography XX; 615231 (2006) https://doi.org/10.1117/12.656503
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

Resolution enhancement techniques (RET), immersion lithography, and Design for Manufacturing (DFM) are all geared towards increasing the lithographic process window to enable the ever more difficult processing demands of semiconductor manufacturing. It is well understood that there is a trade-off between depth of focus (DOF) and exposure dose latitude (EL), as well as best focus (BF) and best exposure dose (BE), in which a Manufacturable Process Window (MPW) must be established and centered. Oftentimes it is overlooked that this balance needs to be maintained across multiple dimensions including spatial (e.g. across field), density (e.g. dense, iso), temporal, tool-to-tool, etc. To maintain this critical balance, both test wafers and product wafers need to be monitored and analyzed in order to support Advanced Process Control (APC) and Automated Equipment Control (AEC). In this work we establish a method to optimize process window by using an integrated analysis workstation based on measurements from both optical and e-beam metrology. By applying this method, we demonstrate a MPW on daily FEM and nominal wafers already used at IMEC for daily process qualification.

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Marcelo Cusacovich, John C. Robinson, Shaunee Cheng, Greet Storms, Philippe Leray, and Gian F. Lorusso "An integrated approach to the determination of a manufacturable process window in advanced microlithography", Proc. SPIE 6152, Metrology, Inspection, and Process Control for Microlithography XX, 615231 (24 March 2006); https://doi.org/10.1117/12.656503

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KEYWORDS

Metrology

Scanning electron microscopy

Semiconducting wafers

Finite element methods

Manufacturing

Lithography

Design for manufacturing

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