Open-loop measurement of data sampling point for SPM

Yueyu Wang; Xuezeng Zhao

doi:10.1117/12.655781

24 March 2006 Open-loop measurement of data sampling point for SPM

Yueyu Wang, Xuezeng Zhao

Proceedings Volume 6152, Metrology, Inspection, and Process Control for Microlithography XX; 615241 (2006) https://doi.org/10.1117/12.655781
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

SPM (Scanning Probe Microscope) provides "three-dimensional images" with nanometer level resolution, and some of them can be used as metrology tools. However, SPM's images are commonly distorted by non-ideal properties of SPM's piezoelectric scanner, which reduces metrological accuracy and data repeatability. In order to eliminate this limit, an "open-loop sampling" method is presented. In this method, the positional values of sampling points in all three directions on the surface of the sample are measured by the position sensor and recorded in SPM's image file, which is used to replace the image file from a conventional SPM. Because the positions in X and Y directions are measured at the same time of sampling height information in Z direction, the image distortion caused by scanner locating error can be reduced by proper image processing algorithm.

Citation Download Citation

Yueyu Wang and Xuezeng Zhao "Open-loop measurement of data sampling point for SPM", Proc. SPIE 6152, Metrology, Inspection, and Process Control for Microlithography XX, 615241 (24 March 2006); https://doi.org/10.1117/12.655781

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