29 March 2006 Study of the effect of amine additives on LWR and LER
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Abstract
We will give an account of our investigation on structure property relationships of amines with regards to line width roughness (LWR) and line edge roughness (LER) of a 193 nm alicyclic-acrylate resist. Specifically, we have looked at basicity, molar volume and logD as factors which may have an influence of roughness of 80 nm 1:1 L/S features. For relatively hydrophobic amines (Log D > -1), the lower the hydrophilicity at acidic pH the greater the LER and LWR becomes. Specifically, in this range of Log D, more hydrophobic larger amines, with higher basicity, tend to give worse L/S feature roughness. For amines which are more hydrophilic, the relationship becomes more complex with some amines giving a lower LER while others do not. This appears to be predicated on a delicate balance between basicity, hydrophilicy and size.
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Francis M. Houlihan, Francis M. Houlihan, David Rentkiewicz, David Rentkiewicz, Guanyang Lin, Guanyang Lin, Dalil Rahman, Dalil Rahman, Douglas Mackenzie, Douglas Mackenzie, Allen Timko, Allen Timko, Takanori Kudo, Takanori Kudo, Clement Anyadiegwu, Clement Anyadiegwu, Muthiah Thiyagarajan, Muthiah Thiyagarajan, Simon Chiu, Simon Chiu, Andrew Romano, Andrew Romano, Ralph R. Dammel, Ralph R. Dammel, Munirathna Padmanaban, Munirathna Padmanaban, "Study of the effect of amine additives on LWR and LER", Proc. SPIE 6153, Advances in Resist Technology and Processing XXIII, 615317 (29 March 2006); doi: 10.1117/12.659465; https://doi.org/10.1117/12.659465
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