21 March 2006 Inverse lithography technology at chip scale
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Abstract
In this paper we describe, from the user's point of view, how Inverse Lithography Technology (ILT) differs from Optical Proximity Correction (OPC). We discuss some specifics of ILT at chip-scale. We show simulation and experimental results from 90nm and 65nm semiconductor nodes, comparing results from ILT-generated masks and OPC-generated masks for real-life layouts, in a production environment. In addition, we discuss issues related to complexity and manufacturability of ILT-generated masks.
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Benjamin Lin, Benjamin Lin, Ming Feng Shieh, Ming Feng Shieh, Jie-wei Sun, Jie-wei Sun, Jonathan Ho, Jonathan Ho, Yan Wang, Yan Wang, Xin Wu, Xin Wu, Wolfgang Leitermann, Wolfgang Leitermann, Orson Lin, Orson Lin, Jason Lin, Jason Lin, Yong Liu, Yong Liu, Linyong Pang, Linyong Pang, "Inverse lithography technology at chip scale", Proc. SPIE 6154, Optical Microlithography XIX, 615414 (21 March 2006); doi: 10.1117/12.656827; https://doi.org/10.1117/12.656827
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