Comparison of immersion lithography from projection and interferometric exposure tools

Stewart A. Robertson; Joanne M. Leonard; Bruce W. Smith; Anatoly Bourov

doi:10.1117/12.658036

21 March 2006 Comparison of immersion lithography from projection and interferometric exposure tools

Stewart A. Robertson, Joanne M. Leonard, Bruce W. Smith, Anatoly Bourov

Proceedings Volume 6154, Optical Microlithography XIX; 61544N (2006) https://doi.org/10.1117/12.658036
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

In this work, an Amphibian XIS interference mini-stepper is used to synthesize the aerial image of 90nm dense line/space pattern produced by an ASML TWINSCAN /1150i immersion scanner, using a second single beam exposure to demodulate the first 100% modulated interference exposure. The experimental data from the scanner and the demodulated interference exposure have near identical exposure latitude and LER (line edge roughness). Whilst the synthetic defocus data also shows a good degree of correlation with the projection data, the level of agreement is a little lower. Overall agreement is good, suggesting that the use of the synthetic aerial image approach is a useful screening tool for photoresists prior to testing on full field scanner system. This technique can be used to predict the performance of future projection tools, allowing cycles of learning in resist development prior to scanner availability.

Citation Download Citation

Stewart A. Robertson, Joanne M. Leonard, Bruce W. Smith, and Anatoly Bourov "Comparison of immersion lithography from projection and interferometric exposure tools", Proc. SPIE 6154, Optical Microlithography XIX, 61544N (21 March 2006); https://doi.org/10.1117/12.658036

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available