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First look at across-chip performance and process noise using non-contact performance-based metrology
Multivariate visualization techniques in statistical process monitoring and their applications to semiconductor manufacturing
Application of integrated scatterometry measurements for a wafer-level litho feedback loop in a high-volume 300 mm DRAM production environment
Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography
Evaluation of an advanced process control solution to detect wafer positioning issues within the hot and cold plate modules of a lithography track
Optical anisotropy approach in spectroscopic ellipsometry to determine the CD of contact hole patterns
Combined use of x-ray reflectometry and spectroscopic ellipsometry for characterization of thin film optical properties