The trends in layout rules and the affect these rules have upon design are described. The slow improvement in resolution has created a need for litho-friendly design. The problems caused by LFD and the increase in number and complexity of rules are shown. Issues in implementing LFD are discussed.
Clair Webb, Clair Webb,
"Layout rule trends and effect upon CPU design", Proc. SPIE 6156, Design and Process Integration for Microelectronic Manufacturing IV, 615602 (10 March 2006); doi: 10.1117/12.664598; https://doi.org/10.1117/12.664598