Femtosecond laser microfabrication of 3D photonic structures

Kock Khuen Seet; Toshiaki Kondo; Vygantas Mizeikis; Vygandas Jarutis; Saulius Juodkazis; Hiroaki Misawa

doi:10.1117/12.674990

26 April 2006 Femtosecond laser microfabrication of 3D photonic structures

Kock Khuen Seet, Toshiaki Kondo, Vygantas Mizeikis, Vygandas Jarutis, Saulius Juodkazis, Hiroaki Misawa

Proceedings Volume 6161, International Conference on Lasers, Applications, and Technologies 2005: Laser-Assisted Micro- and Nanotechnologies; 616103 (2006) https://doi.org/10.1117/12.674990
Event: International Conference on Lasers, Applications, and Technologies 2005, 2005, St. Petersburg, Russian Federation

Abstract

The physical principles underlying the three-dimensional (3D) laser microstructuring technique are outlined, its applications for the fabrication of 3D photonic crystals are described. Structures recorded by direct laser writing and holographic recording techniques in SU-8 photoresist are presented along with their structural and optical characterization.

Citation Download Citation

Kock Khuen Seet, Toshiaki Kondo, Vygantas Mizeikis, Vygandas Jarutis, Saulius Juodkazis, and Hiroaki Misawa "Femtosecond laser microfabrication of 3D photonic structures", Proc. SPIE 6161, International Conference on Lasers, Applications, and Technologies 2005: Laser-Assisted Micro- and Nanotechnologies, 616103 (26 April 2006); https://doi.org/10.1117/12.674990

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