26 April 2006 Femtosecond laser microfabrication of 3D photonic structures
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Proceedings Volume 6161, International Conference on Lasers, Applications, and Technologies 2005: Laser-Assisted Micro- and Nanotechnologies; 616103 (2006) https://doi.org/10.1117/12.674990
Event: International Conference on Lasers, Applications, and Technologies 2005, 2005, St. Petersburg, Russian Federation
Abstract
The physical principles underlying the three-dimensional (3D) laser microstructuring technique are outlined, its applications for the fabrication of 3D photonic crystals are described. Structures recorded by direct laser writing and holographic recording techniques in SU-8 photoresist are presented along with their structural and optical characterization.
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Kock Khuen Seet, Toshiaki Kondo, Vygantas Mizeikis, Vygandas Jarutis, Saulius Juodkazis, Hiroaki Misawa, "Femtosecond laser microfabrication of 3D photonic structures", Proc. SPIE 6161, International Conference on Lasers, Applications, and Technologies 2005: Laser-Assisted Micro- and Nanotechnologies, 616103 (26 April 2006); doi: 10.1117/12.674990; https://doi.org/10.1117/12.674990
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