8 August 2006 The set of the detection and resolution criteria for a phase modulation microscope
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Abstract
The principle of operation and design of the phase interferometric microscope is studied. The description of construction and method of work of microscope MIM-2, created according to this principle is given. With the help of this modulation interferometric microscope the vertical resolution up to shares of nanometers and lateral resolution up to tens nanometers is achieved. The simple model of phase relief creation is formulated. With the help of this model the set of the resolution and discovering criteria for some simple objects such as a column, a step, a groove, a long bulge and so on is formulated.
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Vladimir A. Andreev, Vladimir A. Andreev, Konstantin V. Indukaev, Konstantin V. Indukaev, } "The set of the detection and resolution criteria for a phase modulation microscope", Proc. SPIE 6165, Saratov Fall Meeting 2005: Laser Physics and Photonics, Spectroscopy and Molecular Modeling VI, 61650E (8 August 2006); doi: 10.1117/12.696851; https://doi.org/10.1117/12.696851
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