Elastomer membrane actuators utilizing ultrathin metal electrodes

Orion N. Scott; Hilary Bart-Smith; Matthew R. Begley; Michael H. Jones

doi:10.1117/12.658713

22 March 2006 Elastomer membrane actuators utilizing ultrathin metal electrodes

Orion N. Scott, Hilary Bart-Smith, Matthew R. Begley, Michael H. Jones

Proceedings Volume 6168, Smart Structures and Materials 2006: Electroactive Polymer Actuators and Devices (EAPAD); 61681P (2006) https://doi.org/10.1117/12.658713
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2006, San Diego, California, United States

Abstract

We prepare a thin (~100 μm) silicone-based elastomer membrane and sputter ultra-thin copper electrodes (16-192 nm) onto each side of the film. Voltages of varying magnitude (1-8 kV) are applied to the electrodes causing an electrostatic pressure to develop which then compresses the elastomer in the through thickness direction. The edges of the membrane are constrained against in-plane expansion, forcing the membrane to deform out of plane. The in-plane strains developed by applying an electric field are characterized by measuring the stiffness of the membrane via indentation at different applied voltages. Closed-form solutions for membrane deflection are used with the experimental measurements to determine the relationship between the modulus of the cracked electrode/elastomer multi-layer and the electrically induced in-plane strain. Analytical models predicting the relationship between electrode crack spacing, layer properties, and effective modulus of the multi-layer are presented. Building on the knowledge gained from the membrane experiments, uni- axial tension specimens of an electrode/elastomer multi-layer are tested and preliminary results discussed.

Citation Download Citation

Orion N. Scott, Hilary Bart-Smith, Matthew R. Begley, and Michael H. Jones "Elastomer membrane actuators utilizing ultrathin metal electrodes", Proc. SPIE 6168, Smart Structures and Materials 2006: Electroactive Polymer Actuators and Devices (EAPAD), 61681P (22 March 2006); https://doi.org/10.1117/12.658713

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