31 March 2006 Micro-patterning on cellulose EAPap for biodegradable MEMS
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This paper deals with micro-patterning process of EAPap (Electro-Active Paper) for achieving biodegradable and flexible MEMS. EAPap has been known as an active material with an interesting actuation phenomenon of papers. Such active materials were made by depositing very thin electrodes on both sides of cellulose paper strip. When an electric field is applied to the paper strip, a large displacement was produced. This active material has merits in terms of large strain, low voltage, low power consumption, dryness, cheap and biodegradable nature. This material can be designed in such a way that its advantages can be optimized. With these advantages and possibility, this material is attractive for biodegradable and flexible MEMS. This paper reports a micro-patterning process on flexible EAPap material. Key issues in this biodegradable MEMS fabrication with EAPap are 1) the preparation of EAPap material for micro scale fabrication, 2) micro patterning possibility on EAPap and 3) functional capabilities of sensing and actuation. This paper will introduce a micro contact printing for the micro patterning process on the EAPap flexible membrane.
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Sungryul Yun, Sungryul Yun, Seung-Hun Bae, Seung-Hun Bae, Sangyeol Yang, Sangyeol Yang, Jaehwan Kim, Jaehwan Kim, } "Micro-patterning on cellulose EAPap for biodegradable MEMS", Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 61720F (31 March 2006); doi: 10.1117/12.658351; https://doi.org/10.1117/12.658351

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