31 March 2006 Magnetically actuated micropumps using an Fe-PDMS composite membrane
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In this paper we describe a novel Fe-PDMS composite that can be used to create magnetically actuated polymeric microstructures. The composite is formed by suspending <10μm iron (Fe) particles in polydimethylsiloxane (PDMS) at concentrations ranging from 25-75% by weight. Material properties and processing capabilities have been examined, and to demonstrate material's usefulness we have designed, fabricated, and tested two prototypical micropumps that utilize an Fe-PDMS actuator membrane.
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Jonathan J. Nagel, Jonathan J. Nagel, George Mikhail, George Mikhail, Hongseok Noh, Hongseok Noh, Jeonghoi Koo, Jeonghoi Koo, "Magnetically actuated micropumps using an Fe-PDMS composite membrane", Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 617213 (31 March 2006); doi: 10.1117/12.658012; https://doi.org/10.1117/12.658012

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