31 March 2006 Packaging of an iron-gallium nanowire acoustic sensor
Author Affiliations +
Abstract
The development of packaging for an underwater acoustic sensor is a more complex task than package design for a typical microelectronic device because of the need to simultaneously protect the device from the environment while allowing interaction with it. The goal of this work is to create an underwater acoustic sensor package that will allow sound transmission to the sensor while keeping out moisture and salt ions. A bio-inspired package, based on the hearing mechanisms in fish and other aquatic animals, has been developed for this purpose. The package will ensure reliability in the underwater environment while not interfering with the transmission of sound. The sensor design incorporates magnetostrictive iron-gallium (Galfenol) nanowires. Arrays of cilia-like nanowires mechanically respond to incoming sound waves, thus creating magnetic fields that are sensed by a GMR sensor. The package is designed to contain the nanowires in a fluid medium, leaving them free to move. Materials matching the acoustic impedance of seawater are incorporated to allow sound to penetrate the package. Acoustic properties of various materials were investigated using scanning acoustic microscopy for this application. A fabrication process for the package is presented. The fabrication incorporates a room temperature soldering process that will not harm the sensor during the bonding of package components.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ronald J. DiSabatino, Ronald J. DiSabatino, F. Patrick McCluskey, F. Patrick McCluskey, Alison B. Flatau, Alison B. Flatau, Bethanie J. H. Stadler, Bethanie J. H. Stadler, } "Packaging of an iron-gallium nanowire acoustic sensor", Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 617217 (31 March 2006); doi: 10.1117/12.658597; https://doi.org/10.1117/12.658597
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT

MicroSensors Systems: detection of a dismounted threat
Proceedings of SPIE (May 27 2005)
Fiber optic liquid level sensors for shipboard applications
Proceedings of SPIE (September 25 1995)
MicroSensors Systems: detection of a dismounted threat
Proceedings of SPIE (November 30 2004)
Microfabrication of nanowires-based GMR biosensor
Proceedings of SPIE (May 11 2009)
An SU-8 liquid cell for surface acoustic wave biosensors
Proceedings of SPIE (August 16 2004)
On-chip surface acoustic-wave driven microfluidic motors
Proceedings of SPIE (December 23 2011)

Back to Top