Design and development of microstrip patch antenna at Ka-band using MEMS technology

Preeti Sharma; Shiban K. Koul; Sudhir Chandra

doi:10.1117/12.659030

31 March 2006 Design and development of microstrip patch antenna at Ka-band using MEMS technology

Preeti Sharma, Shiban K. Koul, Sudhir Chandra

Proceedings Volume 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; 61721F (2006) https://doi.org/10.1117/12.659030
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2006, San Diego, California, United States

Abstract

This paper reports a Ka-band microstrip patch antenna fabricated using post-CMOS compatible process technology. The antenna uses an air cavity underneath the patch radiator that is supported on thin membrane. To start with, a thin dielectric film of silicon dioxide is deposited on <100> single crystal silicon substrates by RF sputtering process. The membrane is then realized using bulk micromachining technology. The antenna structure was analyzed and optimized using the finite-element method (FEM) based Ansoft High Frequency Structure Simulator software (version 9). The antenna structure mounted on a test jig with K-connector was used for testing its performance. The measured results of the fabricated prototype antenna agree quite closely with the simulated results. The fabricated antenna resonated at 36 GHz with -10 dB return loss bandwidth of 1.2 GHz. In the absence of access to well-established MEMS foundry, the RF sputtering process reported here can be advantageously used for rapid prototyping of many antenna structures.

Citation Download Citation

Preeti Sharma, Shiban K. Koul, and Sudhir Chandra "Design and development of microstrip patch antenna at Ka-band using MEMS technology", Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 61721F (31 March 2006); https://doi.org/10.1117/12.659030

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