5 April 2006 Feedforward hysteresis compensation in trajectory control of piezoelectrically-driven nanostagers
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Abstract
Complex structural nonlinearities of piezoelectric materials drastically degrade their performance in variety of micro- and nano-positioning applications. From the precision positioning and control perspective, the multi-path time-history dependent hysteresis phenomenon is the most concerned nonlinearity in piezoelectric actuators to be analyzed. To realize the underlying physics of this phenomenon and to develop an efficient compensation strategy, the intelligent properties of hysteresis with the effects of non-local memories are discussed. Through performing a set of experiments on a piezoelectrically-driven nanostager with high resolution capacitive position sensor, it is shown that for the precise prediction of hysteresis path, certain memory units are required to store the previous hysteresis trajectory data. Based on the experimental observations, a constitutive memory-based mathematical modeling framework is developed and trained for the precise prediction of hysteresis path for arbitrarily assigned input profiles. Using the inverse hysteresis model, a feedforward control strategy is then developed and implemented on the nanostager to compensate for the system everpresent nonlinearity. Experimental results demonstrate that the controller remarkably eliminates the nonlinear effect if memory units are sufficiently chosen for the inverse model.
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Saeid Bashash, Saeid Bashash, Nader Jalili, Nader Jalili, } "Feedforward hysteresis compensation in trajectory control of piezoelectrically-driven nanostagers", Proc. SPIE 6173, Smart Structures and Materials 2006: Smart Structures and Integrated Systems, 61730O (5 April 2006); doi: 10.1117/12.658079; https://doi.org/10.1117/12.658079
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