15 March 2006 A simple replication method to fabricate polymer waveguide
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Abstract
We have developed a soft lithography method to replicate polymer waveguides. In this method, the waveguides are produced by a two-step molding process where master mold is first formed on a negatively tone phototresist and subsequently transferred to a PDMS mold, and silicone rubber mold is then used as a stamp to transfer the final waveguide pattern onto a UV cure epoxy. Initial results show good pattern transferring in physical shape. The optical performance is measured based on the propagation loss. In our design, the measurement was measured at 0.26 dB/mm for 1.3μm and 0.24 dB/mm for 1.55μm.
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Chia-Yu Lin, Chia-Yu Lin, Ying-Hong Ling, Ying-Hong Ling, Wei-Ching Chuang, Wei-Ching Chuang, Chi-Ting Ho, Chi-Ting Ho, Wen-Chung Chang, Wen-Chung Chang, Wei-Chih Wang, Wei-Chih Wang, } "A simple replication method to fabricate polymer waveguide", Proc. SPIE 6177, Health Monitoring and Smart Nondestructive Evaluation of Structural and Biological Systems V, 617710 (15 March 2006); doi: 10.1117/12.658940; https://doi.org/10.1117/12.658940
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