Plasma Deposition Of Chalcogenide Glass For Infrared Fibres

J. I. B. Wilson; D. Blanc

doi:10.1117/12.961103

12 May 1986 Plasma Deposition Of Chalcogenide Glass For Infrared Fibres

J. I. B. Wilson, D. Blanc

Proceedings Volume 0618, Infrared Optical Materials and Fibers IV; (1986) https://doi.org/10.1117/12.961103
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States

Abstract

Liquid chlorides and gaseous hydrides have been decomposed by low pressure, plasma-enhanced chemical vapour deposition (PECVD) to give Ge-Se and Ge-S glasses. Their glass transition temperatures were obtained by thermal analysis and their compositions were examined by infrared spectroscopy and energy dispersive X-ray analysis. Results from the prototype deposition system are being used to develop a higher pressure PECVD process.

Citation Download Citation

J. I. B. Wilson and D. Blanc "Plasma Deposition Of Chalcogenide Glass For Infrared Fibres", Proc. SPIE 0618, Infrared Optical Materials and Fibers IV, (12 May 1986); https://doi.org/10.1117/12.961103

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