20 April 2006 Two-dimensional photonic crystals from semiconductor material with polymer filled holes
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Abstract
Polymer filling of the air holes of indiumphosphide based two-dimensional photonic crystals is reported. The filling is performed by infiltration with a liquid monomer and solidification of the infill in situ by thermal polymerization. Complete hole filling is obtained with infiltration under ambient pressure. This conclusion is based both on cross-sectional scanning electron microscope inspection of the filled samples as well as on optical transmission measurements.
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Rob van der Heijden, Rob van der Heijden, Charlotte Kjellander, Charlotte Kjellander, Carl-Fredrik Carlström, Carl-Fredrik Carlström, Juri Snijders, Juri Snijders, Rob W. van der Heijden, Rob W. van der Heijden, Kees Bastiaansen, Kees Bastiaansen, Dick Broer, Dick Broer, Fouad Karouta, Fouad Karouta, Richard Nötzel, Richard Nötzel, Emile van der Drift, Emile van der Drift, Huub W. M. Salemink, Huub W. M. Salemink, } "Two-dimensional photonic crystals from semiconductor material with polymer filled holes", Proc. SPIE 6182, Photonic Crystal Materials and Devices III (i.e. V), 618214 (20 April 2006); doi: 10.1117/12.662660; https://doi.org/10.1117/12.662660
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