20 April 2006 Ultra compact optical link made in amorphous silicon waveguide
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Abstract
This paper reports about the design, fabrication and experimental passive compact building blocks (μbend of 2 μm radius, Y junction and Multi Mode Interference (MMI) splitter of 2 μm wide and 4.2 μm long) in a amorphous hydrogenated silicon (a-Si:H) based strip waveguide. The cross section of the waveguide is about 0.5 μm wide and 0.2 μm high.
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R. Orobtchouk, R. Orobtchouk, S. Jeannot, S. Jeannot, B. Han, B. Han, T. Benyattou, T. Benyattou, J. M. Fedeli, J. M. Fedeli, P. Mur, P. Mur, } "Ultra compact optical link made in amorphous silicon waveguide", Proc. SPIE 6183, Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits, 618304 (20 April 2006); doi: 10.1117/12.664969; https://doi.org/10.1117/12.664969
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