20 April 2006 Ultra compact optical link made in amorphous silicon waveguide
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This paper reports about the design, fabrication and experimental passive compact building blocks (μbend of 2 μm radius, Y junction and Multi Mode Interference (MMI) splitter of 2 μm wide and 4.2 μm long) in a amorphous hydrogenated silicon (a-Si:H) based strip waveguide. The cross section of the waveguide is about 0.5 μm wide and 0.2 μm high.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Orobtchouk, R. Orobtchouk, S. Jeannot, S. Jeannot, B. Han, B. Han, T. Benyattou, T. Benyattou, J. M. Fedeli, J. M. Fedeli, P. Mur, P. Mur, } "Ultra compact optical link made in amorphous silicon waveguide", Proc. SPIE 6183, Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits, 618304 (20 April 2006); doi: 10.1117/12.664969; https://doi.org/10.1117/12.664969


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