20 April 2006 Application of PVD technique to the fabrication of erbium doped ZrF4-based glass ceramic for optical amplification
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Abstract
This paper presents the first optical and spectroscopic characterization of zirconium based fluoride planar waveguides ZE (ZrF4-ErF3) and ZLE (ZrF4-LaF3-ErF3) that have been fabricated by Physical Vapor Deposition (PVD) in dual evaporation configuration [1]. Transparent thin films have been obtained by adjusting vaporization temperature, composition of the ZrF4-based glass and the LaF3-ErF3 batch. In order to improve resistance to moisture, a low refractive index (~1.32) KAlF4 cladding has also been deposited. Infrared spectrum of the waveguides has confirmed the protecting role of the cladding layer for the active layer regarding hydrolysis. Luminescence measurements on waveguide samples have shown promising properties compared with the bulk samples, indicating that this system may be suitable for ceramization like in bulk configuration [2-3].
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Brigitte Boulard, Olivier Péron, Alessandro Chiasera, Maurizio Ferrari, Yoann Jestin, "Application of PVD technique to the fabrication of erbium doped ZrF4-based glass ceramic for optical amplification", Proc. SPIE 6183, Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits, 61831L (20 April 2006); doi: 10.1117/12.662631; https://doi.org/10.1117/12.662631
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