21 April 2006 Comparative performance analysis of 100% fill-factor microlens arrays fabricated by various methods
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Abstract
Fill-factor of microlens arrays (MLAs) is one of the most important performance criteria of microlens arrays (MLA), especially in imaging applications. Low fill-factor lenses suffer greatly from spurious light and diffraction affects and result in low contrast in a beam steering system. Contrast ratio of low fill-factor circular shaped microlens arrays is nearly one-fourth of that of the system with high fill-factor square shaped microlens arrays. In this study performance of various types of nearly 100% fill-factor spherical MLAs in beam steering applications are compared. Design and fabrication of the MLAs are studied. A new hybrid method for design and fabrication of 100% fill-factor MLAs--by combining refractive-diffractive lenses, is suggested and tested.
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A. Akatay, A. Waddie, H. Suyal, M. Taghizadeh, H. Urey, "Comparative performance analysis of 100% fill-factor microlens arrays fabricated by various methods", Proc. SPIE 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration, 61850C (21 April 2006); doi: 10.1117/12.664051; https://doi.org/10.1117/12.664051
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KEYWORDS
Lenses

Microlens array

Diffraction

Spherical lenses

Beam steering

Etching

Isotropic etching

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