21 April 2006 Development of 3D out-of-plane SU-8 microlenses using modified micromolding in capillaries (MIMIC) technology
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Abstract
This paper describes a modification of the standard MIMIC technology, solving its main drawbacks, to define arrays of spherical or ellipsoidal microlenses. Perfectly symmetrical meniscuses have been obtained by using a XP SU-8 NO-2 layer beneath the PDMS mold. Moreover, the photostructurable properties of this polymer allow obtaining self-alignment structures for adequate fiber optics positioning. Microchannels ended with these meniscuses have been filled with standard SU-8 to obtain 3D microlenses. Agreement between theory and experimental results allows confirming the validity of the proposed technology.
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A. Llobera, A. Llobera, R. Wilke, R. Wilke, D. W. Johnson, D. W. Johnson, S. Büttgenbach, S. Büttgenbach, } "Development of 3D out-of-plane SU-8 microlenses using modified micromolding in capillaries (MIMIC) technology", Proc. SPIE 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration, 618512 (21 April 2006); doi: 10.1117/12.661642; https://doi.org/10.1117/12.661642
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