21 April 2006 Temperature dependence of laser backwriting process on glass
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Abstract
We present the laser backwriting process on glass by laser ablation of metal targets, in order to fabricate waveguides on pyrex glasses. An horizontal position of the sample and the plate was found suitable to improve the effect of the plume in the sample with respect to the alternative vertical arrangement. We have analysed the longitudinal and transversal profiles, using a profilometer and have compared the results for the different laser sources used, speeds and metal targets. We have analyzed the refractive index profile of the samples obtained, in order to evaluate the change in the substrate due to the metal ablation. A cleaning of the surface and a heat treatment of the glass has been made in order to improve the results.
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Antonio Castelo, Antonio Castelo, Daniel Nieto, Daniel Nieto, María Teresa Flores-Arias, María Teresa Flores-Arias, Carmen Bao, Carmen Bao, María Victoria Pérez, María Victoria Pérez, Carlos Gómez-Reino, Carlos Gómez-Reino, Clara Isabel López-Gascon, Clara Isabel López-Gascon, Xermán de la Fuente, Xermán de la Fuente, Raul Rangel-Rojo, Raul Rangel-Rojo, } "Temperature dependence of laser backwriting process on glass", Proc. SPIE 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration, 61851B (21 April 2006); doi: 10.1117/12.663377; https://doi.org/10.1117/12.663377
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