21 April 2006 New generation of fully integrated optical microscopes on-chip: application to confocal microscope
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Abstract
In the paper the new concept of fully integrated scanning confocal optical microscope on-chip is proposed. The operation of this microscope combines the 3-D transmissive scanning of VCSEL laser beam by use of two MOEMS scanners, and active signal detection, based on the optical feedback in the VCSEL laser cavity. The silicon-based electrostatically driven scanners provide controlled movement of two convex microlenses, working as an objective lens of microscope. Glass microlenses are monolithically integrated on movable silicon tables of scanners. The first results of technological investigation on the microscope components are presented.
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Sylwester Bargiel, Sylwester Bargiel, Lukasz Nieradko, Lukasz Nieradko, Michal Józwik, Michal Józwik, Christophe Gorecki, Christophe Gorecki, Jan A. Dziuban, Jan A. Dziuban, } "New generation of fully integrated optical microscopes on-chip: application to confocal microscope", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 618602 (21 April 2006); doi: 10.1117/12.663770; https://doi.org/10.1117/12.663770
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