Biological applications require more and more compact, sensitive and reliable microsystems. We will present solutions in order to realize a "microspectroscopy" up to Terahertz frequencies of various biological entities (living cell, neurons, proteins...). We investigate these entities in liquid phase. In a recent work, we have demonstrated a solution to excite efficiently a single wire transmission line . The propagation mode is similar to a surface
plasmon and known as a Goubau-mode . The wire we used is extremely thin compared to other recent solutions at terahertz frequencies. There are three orders of magnitude in the size of the wire used by K. Wang and D.M. Mittleman. Typically the wire's width is 1μm compared to the 900μm diameter metal wire in . Moreover our solution is in a planar configuration which is more suitable for microfluidic applications. We benefit from the high confinement of the electromagnetic field around this very thin gold wire to optimize the sensitivity of these Terahertz BioMEMS. Microfluidic channels are placed below the strip in a perpendicular direction. We will first present some properties of the Planar Goubau-Line (PGL)  and the measurements results obtained with structures fabricated on glass and quartz substrates. In a last part resonant structures and Mach-Zehnder type interferometers will also be presented.