21 April 2006 Compact and stress-released piston tip-tilt mirror
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Abstract
Devices based on SOI technology are subject to bow due to residual stress induced by the buried oxide. We have designed and fabricated a compact tunable piston tip-tilt mirror device in which the shape and the arrangement of the suspension beams result in both a reduced stress in the suspension beams and an optically flat mirror. The piston tip-tilt mirror is characterized by an accurate vertical displacement of up to 18 μm @ 80 V with good repeatability, and a tip-tilt of up to 2 mrad @ 50 V.
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W. Noell, W. Noell, T. Overstolz, T. Overstolz, R. Stanley, R. Stanley, N. F. de Rooij, N. F. de Rooij, } "Compact and stress-released piston tip-tilt mirror", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860H (21 April 2006); doi: 10.1117/12.666511; https://doi.org/10.1117/12.666511
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