Tunable mechanical resonator with aluminium nitride piezoelectric actuation

J. Olivares; J. Malo; S. González; E. Iborra; I. Izpura; M. Clement; A. Sanz-Hervás; J. L. Sánchez-Rojas; P. Sanz

doi:10.1117/12.664444

21 April 2006 Tunable mechanical resonator with aluminium nitride piezoelectric actuation

J. Olivares, J. Malo, S. González, E. Iborra, I. Izpura, M. Clement, A. Sanz-Hervás, J. L. Sánchez-Rojas, P. Sanz

Proceedings Volume 6186, MEMS, MOEMS, and Micromachining II; 61860K (2006) https://doi.org/10.1117/12.664444
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

The electromechanical response of piezoelectrically-actuated AlN micromachined bridge resonators has been characterized using laser interferometry and electrical admittance measurements. We compare the response of microbridges with different dimensions and buckling (induced by the initial residual stress of the layers). The resonance frequencies are in good agreement with numerical simulations of the electromechanical behavior of the structures. We show that it is possible to perform a rough tuning of the resonance frequencies by allowing a determined amount of built-in stress in the microbridge during its fabrication. Once the resonator is made, a DC bias added to the AC excitation signal allows to fine-tune the frequency. Our microbridges yield a tuning factor of around 88 Hz/V for a 500 μm-long microbridge.

Citation Download Citation

J. Olivares, J. Malo, S. González, E. Iborra, I. Izpura, M. Clement, A. Sanz-Hervás, J. L. Sánchez-Rojas, and P. Sanz "Tunable mechanical resonator with aluminium nitride piezoelectric actuation", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860K (21 April 2006); https://doi.org/10.1117/12.664444

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