Translator Disclaimer
21 April 2006 Optical probing of nano-electromechanical systems (NEMS)
Author Affiliations +
Abstract
Optical techniques are finding more and more use in the domain of nanoelectromechanical systems (NEMS). In particular, Michelson interferometry and Fabry-Perot interferometry have been employed to transduce high frequency motion of NEMS resonators. Here, we review our recent accomplishments in optical probing of NEMS. We discuss the effectiveness of the above-mentioned optical techniques as the relevant NEMS dimensions are reduced beyond the optical probing wavelength.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. L. Ekinci, D. Karabacak, T. Kouh, and D. H. Kim "Optical probing of nano-electromechanical systems (NEMS)", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860M (21 April 2006); https://doi.org/10.1117/12.665299
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
Back to Top