Translator Disclaimer
21 April 2006 Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS
Author Affiliations +
Abstract
Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micromirror. This enables the definition of the linear, non-linear, and modal resonance zones of its dynamical response.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yves Emery, Etienne Cuche, François Marquet, Nicolas Aspert, Pierre Marquet, Jonas Kühn, Mikhail Botkine, Tristan Colomb, Frédéric Montfort, Florian Charrière, Christian Depeursinge, Patrick Debergh, and Ramiro Conde "Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860N (21 April 2006); https://doi.org/10.1117/12.660029
PROCEEDINGS
5 PAGES


SHARE
Advertisement
Advertisement
Back to Top