21 April 2006 Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS
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Abstract
Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micromirror. This enables the definition of the linear, non-linear, and modal resonance zones of its dynamical response.
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Yves Emery, Yves Emery, Etienne Cuche, Etienne Cuche, François Marquet, François Marquet, Nicolas Aspert, Nicolas Aspert, Pierre Marquet, Pierre Marquet, Jonas Kühn, Jonas Kühn, Mikhail Botkine, Mikhail Botkine, Tristan Colomb, Tristan Colomb, Frédéric Montfort, Frédéric Montfort, Florian Charrière, Florian Charrière, Christian Depeursinge, Christian Depeursinge, Patrick Debergh, Patrick Debergh, Ramiro Conde, Ramiro Conde, } "Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860N (21 April 2006); doi: 10.1117/12.660029; https://doi.org/10.1117/12.660029
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