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27 April 2006 A comparison of surface metrology techniques
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The study of nanometre surface metrology is becoming more and more commonplace in industrial and research environments. Because of this expansion there are more and more technologies available for looking at the surface and due to the differences in the techniques each has its own specialist applications. Stylus profilometry, white light interferometry and confocal microscopy are common techniques used to measure surface metrology to nanometre precision. Strengths and weaknesses of each of the techniques are discussed with examples.
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Mike Conroy and Joe Armstrong "A comparison of surface metrology techniques", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880B (27 April 2006); doi: 10.1117/12.663390;

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