27 April 2006 Automated variable wavelength interferometry in reflected light mode
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Abstract
The paper concentrates on the double-refracting systems - particularly variable wavelength techniques (VAWI) for reflected light... The family of techniques for (transmitted and reflected light) is especially recommended for studying objects, which produce optical path difference more than a few wavelengths. In such cases classical approach consisting in measuring deflection of interference fringes is not useful because of edge effects that break continuity of interference fringes. The VAWI methods have been invented in the time when image processing devices and computers were hardly available. Automated devices unfold a completely new approach to the classical measurement procedures. The paper discusses mainly construction aspects of the systems in context of the computerised instruments.
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D. Litwin, J. Galas, N. Blocki, "Automated variable wavelength interferometry in reflected light mode", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880F (27 April 2006); doi: 10.1117/12.662238; https://doi.org/10.1117/12.662238
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