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28 April 2006 Fast wavelength-scanning interferometry technique with derivative detection of quadrature signals
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We present a laser interferometer where a narrow-line width tuneable VCSEL laser (Vertical-Cavity Surface-Emitting Laser) working at 760 nm is used. For the detection of an absolute distance, we have used a fast wavelength-scanning interferometry technique. In the first part of the work we introduce the absolute laser interferometer as a demonstrator for research of a digital detection of quadrature signals (X-cos and Y-sin). This interferometer uses polarized beams and magnitude division of interference fringes. The wavelength of VCSEL laser is swept with the mode-hop free tuning range more than 1.2 nm, by means of the amplitude modulation of the injection current. At the same time, the operating temperature of the VCSEL is stabilized with a fast digital temperature controller. We control the wavelength value and whole tuning process of the laser with the frequency lock to selected modes of an external Fabry-Perot etalon. Except the frequency lock, the Fabry-Perot mode spectrum identifies wavelength-tuning interval of VCSEL during each sweep. A digital signal processor (DSP) is heart of the control and detection system. It samples intensity signal from Fabry-Perot etalon and X-Y quadrature signals from the detection unit of the interferometer. After 1 nm sweep of the VCSEL wavelength, we obtain a number of passed interference fringes and the number of passed Fabry-Perot resonance modes, at the same time. On basis of these measured quantities we are able to calculate the instantaneous value of the optical path length difference between the measuring and reference arm of the demonstrational interferometer. The other part of the work is oriented to research and experimental testing of the digital detection of quadrature signals (X-cos and Y-sin) processed only on basis of one intensity signal (X-axis) that is produced by a simple photo-detector. On basis of traditional inversion function arctan(Y/X) we are able to determine instantaneous phase between interference beams in each part of recorded signals. In the work the first introduction of the method and measured records are presented.
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O. Číp, B. Mikel, and J. Lazar "Fast wavelength-scanning interferometry technique with derivative detection of quadrature signals", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61881F (28 April 2006);

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