AFM benchmark for the profile characterisation of subwavelength diffractive elements within the EC Network of Excellence on Micro-Optics (NEMO)

N. Destouches; H. P. Herzig; W. Nakagawa; H. Ottevaere; J. Pietarinen; S. Reynaud; J. Tervo; S. Tonchev; J. Turunen; J. Van Erps; M. Kujawinska

doi:10.1117/12.668466

27 April 2006 AFM benchmark for the profile characterisation of subwavelength diffractive elements within the EC Network of Excellence on Micro-Optics (NEMO)

N. Destouches, H. P. Herzig, W. Nakagawa, H. Ottevaere, J. Pietarinen, S. Reynaud, J. Tervo, S. Tonchev, J. Turunen, J. Van Erps, M. Kujawinska

Author Affiliations +

Proceedings Volume 6188, Optical Micro- and Nanometrology in Microsystems Technology; 61881K (2006) https://doi.org/10.1117/12.668466
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

The round robin "measurement of subwavelength diffractive elements" tackles the metrology problems related to the measurement of diffraction gratings by AFM. It aims at quantifying the absolute precision and the uncertainty of the measurement considering some features of such structures like the depth, the period, the fill factor and the shape of the profile. This round robin involved four partners within NEMO. Each partner has measured three different samples: one 2D small depth grating, one 1D small depth grating and one 1D high aspect ratio grating. In order to get rid of the samples inhomogeneity, the measurements were performed exactly at the same location on each sample by all partners. This was achieved by using a multiscale resist pattern transferred on the gratings which precisely defined a 5×5 μm² area. The paper will sum up the experimental values obtained by all the partners, draw general conclusions and make suggestions to improve the accuracy of AFM measurements.

Citation Download Citation

N. Destouches, H. P. Herzig, W. Nakagawa, H. Ottevaere, J. Pietarinen, S. Reynaud, J. Tervo, S. Tonchev, J. Turunen, J. Van Erps, and M. Kujawinska "AFM benchmark for the profile characterisation of subwavelength diffractive elements within the EC Network of Excellence on Micro-Optics (NEMO)", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61881K (27 April 2006); https://doi.org/10.1117/12.668466

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
11 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Atomic force microscopy

Diffraction gratings

Scanning electron microscopy

Calibration

Optical testing

Micro optics

Metrology

Show All Keywords

Keywords/Phrases

Search In:

Publication Years