Experimental and theoretical study of the laser micromacining of glass using high-repetition-rate ultrafast laser

Yuri Yashkir; Qiang Liu

doi:10.1117/12.662343

17 April 2006 Experimental and theoretical study of the laser micro-machining of glass using high-repetition-rate ultrafast laser

Yuri Yashkir, Qiang Liu

Author Affiliations +

Proceedings Volume 6190, Solid State Lasers and Amplifiers II; 61900V (2006) https://doi.org/10.1117/12.662343
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

We present a systematic study of the ultrafast laser micro-machining of glass using a Ti:Spp laser with moderate pulse energy (<5 μJ) at a high repetition rate (50 kHz). Optimal conditions were identified for high resolution surface laser etching, and via drilling. Several practical applications were developed: glass templates for micro fluid diffraction devices, phase gratings for excimer laser projection techniques, micro fluid vertical channel-connectors, etc. It is demonstrated that the interaction of ultrafast laser pulses with glass combines several different processes (direct ablation, explosive material ejection, and thermal material modification). A dynamic numerical model was developed for this process. It was successfully used for modelling of laser micro-machining with arbitrary 3D translations of the target.

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Yuri Yashkir and Qiang Liu "Experimental and theoretical study of the laser micro-machining of glass using high-repetition-rate ultrafast laser", Proc. SPIE 6190, Solid State Lasers and Amplifiers II, 61900V (17 April 2006); https://doi.org/10.1117/12.662343

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