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20 April 2006 Elaboration of transparent conductive oxide films for flexible organic electroluminescent devices
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In this study, we presented high-performance flexible organic light-emitting diodes (FOLEDs); to do so, we prepared indium-tin oxide (ITO) thin layers by ion beam sputtering (IBS) on polyethylene terephtalate (PET) substrates in soft low temperature conditions. The IBS technology seems well adapted to us to adjust the conduction level of the interface films to the one of the various organic materials making up the fabrication processes of the organic optoelectronic components; moreover this technique does not require a high substrate temperature or an annealing after ITO deposition to crystallize the obtained layers. Because of the great number of deposition parameters (oxygen flow, substrate temperature, deposition rate...) playing interdependent roles and strongly influencing the electrical, optical and structural properties of the layers, we optimized the effects of these different parameters separately by using electrical and optical characterizations as well as X-ray diffraction analyses. The performances of FOLEDs on PET substrate with different ITO thicknesses were investigated and compared to the ones of a conventional organic light-emitting diode realized on glass substrate and according to the same device configuration.
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Bruno Lucas, Wassim Rammal, Aumeur El Amrani, André Moliton, and Isabelle Séguy "Elaboration of transparent conductive oxide films for flexible organic electroluminescent devices", Proc. SPIE 6192, Organic Optoelectronics and Photonics II, 61921M (20 April 2006);

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