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5 August 1986 Applications Of Heterodyne Interferometry To Disc Drive Technology
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Proceedings Volume 0621, Manufacturing Applications of Lasers; (1986) https://doi.org/10.1117/12.961156
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States
Abstract
The challenges to metrology provided by the extreme precision required by disc memory technology is described. Heterodyne interferometry is shown to be able to meet the metrology requirements and to provide a more direct interpretation of the results than other methods.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert Davidson "Applications Of Heterodyne Interferometry To Disc Drive Technology", Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); https://doi.org/10.1117/12.961156
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