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12 May 2006 All solid-state 193nm source with 5mJ pulse energy
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Abstract
Using CBO crystal as the final mixing nonlinear optical crystal, we generated 5mJ/pulse at 193nm. The high pulse energy at 193nm is a result of several factors. The efficiency of CBO is about three times better than that of LBO, and an order of magnitude better than BBO. Novel designs in 4th and 5th harmonic generators using readily available BBO crystals allow the stable, efficient and repetitive generation of high pulse energy at the 5th harmonic of 1064nm.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sheng Wu, Yicheng Wu, Peizhen Fu, and Chuangtian Chen "All solid-state 193nm source with 5mJ pulse energy", Proc. SPIE 6216, Laser Source and System Technology for Defense and Security II, 62160R (12 May 2006); https://doi.org/10.1117/12.665370
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