Laser interferometric transducers of linear displacements for inspection and control systems

Vladimir M. Vedernikov

doi:10.1117/12.677582

9 June 2006 Laser interferometric transducers of linear displacements for inspection and control systems

Vladimir M. Vedernikov

Proceedings Volume 6251, Lasers for Measurements and Information Transfer 2005; 625102 (2006) https://doi.org/10.1117/12.677582
Event: Lasers for Measurements and Information Transfer 2005, 2005, St. Petersburg, Russian Federation

Abstract

Design principles of homodyne laser interferometric linear displacement transducers (LIDT) realizing within their interface modules an original digital data processing algorithm are considered. The use of designed LIDT as a feedback transmitter in X-Y table control system of laser photoplotter CLWS-300 is given as an example. The system provides table positioning accuracy of ± 5 nm. Maximum velocity of the table is 1 m/s. Laser displacement measurer with small-size digital indicator unit is described. The results of inspection and calibration of measuring systems of unique processing center of Italian company "Berardy" are presented.

Citation Download Citation

Vladimir M. Vedernikov "Laser interferometric transducers of linear displacements for inspection and control systems", Proc. SPIE 6251, Lasers for Measurements and Information Transfer 2005, 625102 (9 June 2006); https://doi.org/10.1117/12.677582

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