9 June 2006 Reflectometer
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Proceedings Volume 6251, Lasers for Measurements and Information Transfer 2005; 62510A (2006) https://doi.org/10.1117/12.677594
Event: Lasers for Measurements and Information Transfer 2005, 2005, St. Petersburg, Russian Federation
Abstract
Our development concerns an optical instrument-making, particularly the reflectometers - the instruments intended for a measurement of a reflection coefficient of the smooth surfaces by an extra accuracy method using an interflection of the controllable sample. At the same time a problem of measurement of the light-transmission factor for transparent samples (with or without any optical antireflecting coating) is solved including a possibility of the multiple passing of the radiation through the investigated sample. The purpose of this research was a creation of a metrological test bench to measure reflection coefficients of mirrors with the high-reflective (close to 1) multi-layer interference surfaces with the help of the high-precision, noninvasive and nondestructive method and the measurement of the light-transmission factor for transparent samples. The detailed calculation of the optical scheme for several wave bands has been made. An analysis of the influence of different factors on a measurement error has been carried out. It has been demonstrated that the use of the offered reflectometer would allow to reduce the measurement errors.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. R. Malamed, I. E. Putilov, T. E. Tarasova, "Reflectometer", Proc. SPIE 6251, Lasers for Measurements and Information Transfer 2005, 62510A (9 June 2006); doi: 10.1117/12.677594; https://doi.org/10.1117/12.677594
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