Surface scattering in SOI field-effect transistor

S. D. Ananiev; V. V. V'yurkov; V. F. Lukichev

doi:10.1117/12.677221

10 June 2006 Surface scattering in SOI field-effect transistor

S. D. Ananiev, V. V. V'yurkov, V. F. Lukichev

Proceedings Volume 6260, Micro- and Nanoelectronics 2005; 62600O (2006) https://doi.org/10.1117/12.677221
Event: Micro- and Nanoelectronics 2005, 2005, Zvenigorod, Russian Federation

Abstract

The influence of surface roughness scattering on channel conductivity of ultrathin body MOSFET in a quantum mechanical approach is considered. Analyzing a counterplay between Coulomb and surface scattering we show that a transition from dominating Coulomb scattering towards dominating surface scattering occurs when the film thickness is reduced to few nanometers. Evidently, the "critical" film thickness depends upon roughness characteristics and surface charged defects density. We have also examined the ripple-wise roughness which gives rise 4^th power law of dependence of mobility on film thickness. In spite of a smaller power compared to that for smooth roughness the ripple-wise roughness could dominate just on Si/Si0₂ interface due to high discrepancy in lattice constants of contacting materials.

Citation Download Citation

S. D. Ananiev, V. V. V'yurkov, and V. F. Lukichev "Surface scattering in SOI field-effect transistor", Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 62600O (10 June 2006); https://doi.org/10.1117/12.677221

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available