10 June 2006 Simultaneous fitting of several x-ray rocking curves from different crystallographic planes of multilayer heterostructures
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Proceedings Volume 6260, Micro- and Nanoelectronics 2005; 626014 (2006) https://doi.org/10.1117/12.683399
Event: Micro- and Nanoelectronics 2005, 2005, Zvenigorod, Russian Federation
Abstract
A general mathematical approach is realized for simultaneous treatment of several X-ray rocking curves from different crystallographic planes. The corresponding analysis of experimental X-ray rocking curves for (004), (113) and (115) reflections from the single quantum well GaAs-InxGa1-xAs/GaAs(001) heterostructure have been carried out. This approach allows one to restore the depth profiles of the lattice mismatch and mean-square displacements of atoms from regular positions for particular layers as well as to estimate the anisotropy of in-plane and normal-to-plane random atom displacements.
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M. A. Chuev, M. A. Chuev, A. A. Lomov, A. A. Lomov, R. M. Imamov, R. M. Imamov, I. A. Ivanov, I. A. Ivanov, } "Simultaneous fitting of several x-ray rocking curves from different crystallographic planes of multilayer heterostructures", Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 626014 (10 June 2006); doi: 10.1117/12.683399; https://doi.org/10.1117/12.683399
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