31 May 2006 4 kHz KrF-laser with plate-like electrodes
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Proceedings Volume 6263, Atomic and Molecular Pulsed Lasers VI; 626304 (2006) https://doi.org/10.1117/12.677388
Event: Atomic and Molecular Pulsed Lasers VI, 2005, Tomsk, Russian Federation
Abstract
The electric-discharge KrF-laser with inductive-capacitive discharge stabilization and a pulse repetition rate up to 4 kHz is developed. The multisectional discharge gap with length of 25 cm was formed by 25 pairs of anode-cathode plates. The narrow discharge width of ≤1 mm was realized. The buffer gases He and Ne with F2 as the donor of fluorine were used. The maximum laser energy was ≈6mJ by using Ne/Kr/F2 mixture at a total pressure of 1.6...3.2 atm. The maximum laser efficiency was ≈1.4%. For measuring of the gas flow velocity in discharge gap the original optical method is used. The maximum gas velocity in the working gap is 19 m s-1. The average output power of KrF laser is ≈12 W at the pulse repetition rate of 3...4 kHz. The relative root-mean-square deviation of the laser pulse energy is σ=2...3.8%. It was shown, that laser beam profile formation in a laser cavity essentially depends on a gradient of refractive index of the active medium Δn, was made by free plasma electrons. The value of a refractive index gradient at the KrF laser wavelength is grad n ≥ 10-5 cm-1.
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A. V. Andramanov, A. V. Andramanov, S. A. Kabaev, S. A. Kabaev, B. V. Lazhintsev, B. V. Lazhintsev, V. A. Nor-Arevyan, V. A. Nor-Arevyan, A. V. Pisetskaya, A. V. Pisetskaya, V. D. Selemir, V. D. Selemir, } "4 kHz KrF-laser with plate-like electrodes", Proc. SPIE 6263, Atomic and Molecular Pulsed Lasers VI, 626304 (31 May 2006); doi: 10.1117/12.677388; https://doi.org/10.1117/12.677388
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