31 May 2006 4 kHz KrF-laser with plate-like electrodes
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Proceedings Volume 6263, Atomic and Molecular Pulsed Lasers VI; 626304 (2006) https://doi.org/10.1117/12.677388
Event: Atomic and Molecular Pulsed Lasers VI, 2005, Tomsk, Russian Federation
The electric-discharge KrF-laser with inductive-capacitive discharge stabilization and a pulse repetition rate up to 4 kHz is developed. The multisectional discharge gap with length of 25 cm was formed by 25 pairs of anode-cathode plates. The narrow discharge width of ≤1 mm was realized. The buffer gases He and Ne with F2 as the donor of fluorine were used. The maximum laser energy was ≈6mJ by using Ne/Kr/F2 mixture at a total pressure of 1.6...3.2 atm. The maximum laser efficiency was ≈1.4%. For measuring of the gas flow velocity in discharge gap the original optical method is used. The maximum gas velocity in the working gap is 19 m s-1. The average output power of KrF laser is ≈12 W at the pulse repetition rate of 3...4 kHz. The relative root-mean-square deviation of the laser pulse energy is σ=2...3.8%. It was shown, that laser beam profile formation in a laser cavity essentially depends on a gradient of refractive index of the active medium Δn, was made by free plasma electrons. The value of a refractive index gradient at the KrF laser wavelength is grad n ≥ 10-5 cm-1.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. V. Andramanov, A. V. Andramanov, S. A. Kabaev, S. A. Kabaev, B. V. Lazhintsev, B. V. Lazhintsev, V. A. Nor-Arevyan, V. A. Nor-Arevyan, A. V. Pisetskaya, A. V. Pisetskaya, V. D. Selemir, V. D. Selemir, } "4 kHz KrF-laser with plate-like electrodes", Proc. SPIE 6263, Atomic and Molecular Pulsed Lasers VI, 626304 (31 May 2006); doi: 10.1117/12.677388; https://doi.org/10.1117/12.677388


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