31 May 2006 The pump intensity effect on the efficiency of discharge-pumped ArF excimer laser on a mixture of He:Ar:F2
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Proceedings Volume 6263, Atomic and Molecular Pulsed Lasers VI; 626306 (2006) https://doi.org/10.1117/12.677390
Event: Atomic and Molecular Pulsed Lasers VI, 2005, Tomsk, Russian Federation
Abstract
The results of experimental study of the pump intensity and active media parameters effect on output energy and efficiency of a discharge-pumped ArF (193 nm) excimer laser on a mixture of He:Ar:F2 are presented. It was experimentally shown that for the achievement of maximal output energy with maximal efficiency of an ArF excimer laser it is necessary to use an optimal pump intensity of 4.5-5.0 MW/cm3. To achieve such active media pump intensity the excitation scheme of the LC-inverter type has been used where the energy losses inside discharge circuit had been decreased. Using the pump intensity of 5.0 MW/cm3 in an active media of He:Ar:F2 - 79.7:20:0.3 at total pressure of 2.4 atm the output energy of 1.3 J at the total efficiency of 2.0% was obtained for the first time.
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Alexander M. Razhev, Andrey A. Zhupikov, "The pump intensity effect on the efficiency of discharge-pumped ArF excimer laser on a mixture of He:Ar:F2", Proc. SPIE 6263, Atomic and Molecular Pulsed Lasers VI, 626306 (31 May 2006); doi: 10.1117/12.677390; https://doi.org/10.1117/12.677390
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