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14 June 2006 Lightweight instrument mirrors from single-crystal silicon
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Abstract
We describe a process for fabricating lightweight mirrors from single crystal silicon. We also report ambient and cryogenic test results on a variety of mirrors made by this process. Each mirror is a monolithic structure from a single crystal of silicon. Masses are typically 1/3rd to 1/4th that of an equal diameter solid quartz mirror. We avoid print through of the supporting structure by lightweighting after the optical surface has been formed. Because of the extraordinary homogeneity of single crystal silicon, distortion of the optical surface by the lightweighting process is negligible for most applications (<1/40th wave RMS @ 633nm). This homogeneity also accounts for the near zero distortion at cryogenic temperatures.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vincent T. Bly, Maria D. Nowak, and David O. Moore "Lightweight instrument mirrors from single-crystal silicon", Proc. SPIE 6265, Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter, 62652O (14 June 2006); https://doi.org/10.1117/12.672210
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