Development of a compact high-load PZT-ceramic long-travel linear actuator with picometer resolution for active optical alignment applications

H. Marth; B. Lula

doi:10.1117/12.671984

6 July 2006 Development of a compact high-load PZT-ceramic long-travel linear actuator with picometer resolution for active optical alignment applications

H. Marth, B. Lula

Author Affiliations +

Proceedings Volume 6273, Optomechanical Technologies for Astronomy; 62731K (2006) https://doi.org/10.1117/12.671984
Event: SPIE Astronomical Telescopes + Instrumentation, 2006, Orlando, Florida , United States

Abstract

This paper describes a high-force PZT-ceramic based linear actuator for long-travel, high resolution applications. Different modes of operation offer high bandwidth dither, step and constant velocity slew motion. The drive is self-locking and does not expend energy to hold a position. This development was originally undertaken for applications in the semiconductor industry and mature serial production actuators are now embedded in machinery to actively collimate heavy optic assemblies weighing 10's of kg in multiple axes with nanometer resolution.

Citation Download Citation

H. Marth and B. Lula "Development of a compact high-load PZT-ceramic long-travel linear actuator with picometer resolution for active optical alignment applications", Proc. SPIE 6273, Optomechanical Technologies for Astronomy, 62731K (6 July 2006); https://doi.org/10.1117/12.671984

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