27 June 2006 Progress on background-limited membrane-isolated TES bolometers for far-IR/submillimeter spectroscopy
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Abstract
To determine the lowest attainable phonon noise equivalent power (NEP) for membrane-isolation bolometers, we fabricated and measured the thermal conductance of suspended Si3N4 beams with different geometries via a noise thermometry technique. We measured beam cross-sectional areas ranging from 0.35 × 0.5 μm2 to 135 × 1.0 μm2 and beam lengths ranging from 700 μm to 8300 μm. The measurements directly imply that membrane-isolation bolometers are capable of reaching a phonon noise equivalent power (NEP) of 4×10-20 W/Hz1/2. This NEP is adequate for the Background-Limited Infrared-Submillimeter Spectrograph (BLISS) proposed for the Japanese SPICA observatory, and adequate for NASA's SAFIR observatory, a 10-meter, 4 K telescope to be deployed at L2. Further, we measured the heat capacity of a suspended Si3N4 membrane and show how this result implies that one can make membrane-isolation bolometers with a response time which is fast enough for BLISS.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Kenyon, P. K. Day, C. M. Bradford, J. J. Bock, H. G. Leduc, "Progress on background-limited membrane-isolated TES bolometers for far-IR/submillimeter spectroscopy", Proc. SPIE 6275, Millimeter and Submillimeter Detectors and Instrumentation for Astronomy III, 627508 (27 June 2006); doi: 10.1117/12.672036; https://doi.org/10.1117/12.672036
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