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15 June 2006 Development of n-type CCDs for NeXT, the next Japanese x-ray astronomical satellite mission
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Abstract
We have developed X-ray charge-coupled devices (CCD) for the next Japanese X-ray astronomical satellite mission, NeXT (Non-thermal energy eXploration Telescope). The hard X-ray telescope(HXT) onboard the NeXT can focus X-rays above 10 keV. Therefore, we need to develop an X-ray CCD for a focal plane detector to cover the 0.3-25 keV band in order to satisfy the capability of the telescope. We newly developed an n-type CCD fabricated on an n-type silicon wafer to expand the X-ray energy range as a focal plane detector of the HXT. It is possible to have a thick depletion layer of approx. 300μm with an n-type CCD because it is easy to obtain high resistivity with an n-type silicon wafer compared to a p-type silicon wafer. We developed prototypes of n-type CCDs and evaluated their X-ray performance, energy resolution, charge transfer inefficiency(CTI) and the thickness of the depletion layer of two devices, designated Pch15 and Pch-teg. We measured the thickness of the depletion layer of Pch15 to be 290±33μm. For Pch-teg, the energy resolution was 152±3eV full width at half maximum (FWHM) at 5.9 keV and the readout noise was 7.3 e-. The performance of the n-type CCDs was comparable to that of p-type CCDs, and their depletion layer were much thicker than those of p-type CCDs.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. Matsuura, M. Tohiguchi, H. Ozawa, E. Miyata, H. Tsunemi, S. Takagi, T. Inui, T. G. Tsuru, Y. Kamata, S. Miyazaki, H. Nakaya, K. Miyaguchi, H. Muramatsu, and H. Suzuki "Development of n-type CCDs for NeXT, the next Japanese x-ray astronomical satellite mission", Proc. SPIE 6276, High Energy, Optical, and Infrared Detectors for Astronomy II, 627612 (15 June 2006); https://doi.org/10.1117/12.671090
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