31 May 2006 Design of cold-cathode ion sources for precise electron-beam processing of the semiconductor structures
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Proceedings Volume 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 62780B (2006) https://doi.org/10.1117/12.693191
Event: Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2005, Moscow, Russian Federation
Abstract
The grounds to choose the construction of the cold-cathode ion-sources for microphotoelectronic production are presented.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. N. Kozlov, A. N. Kozlov, A. I. Zaitsev, A. I. Zaitsev, A. E. Danilovskiy, A. E. Danilovskiy, A. M. Filachev, A. M. Filachev, "Design of cold-cathode ion sources for precise electron-beam processing of the semiconductor structures", Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780B (31 May 2006); doi: 10.1117/12.693191; https://doi.org/10.1117/12.693191
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